An biya kariya ta muhalli da yawa, musamman tare da yawan karuwa na Haze. Injiniyan daki mai tsabta shine ɗayan matakan kariya na muhalli. Ta yaya zaka yi amfani da injin injin tsabtace don yin aiki mai kyau a kare muhalli? Bari muyi magana game da sarrafawa a cikin injin injin mai tsabta.
Zazzabi da kuma sarrafa zafi a daki mai tsabta
Za a iya ƙaddara zafin jiki da zafi a sarari gwargwadon tsari, amma lokacin da aka gudanar da bukatun aiwatarwa, ya kamata a la'akari da ta'aziyya. Tare da haɓaka buƙatun tsabtace ta iska, akwai yanayin buƙatun ciyawar don zafin jiki da zafi a tsari.
A matsayin gaba ɗaya ka'idodin aiki, saboda yawan sarrafawa na aiki, da buƙatun don kewayon zafin jiki yana zama ƙarami da karami. Misali, a cikin Lithography da bayyanar aiwatar da manyan-sikelin samar da kewayewa, banbanci a cikin fadada yaduwa tsakanin gilashin da silicon socrers suna amfani da kayan mashin.
Wahararren silicon tare da diamita na 100 μ m yana haifar da fadada layin 0.24 μ m lokacin da zazzabi ya tashi ta 1 digiri. Sabili da haka, zazzabi akai-akai 0.1 ℃ ya zama dole, kuma darajar zafi tana da ƙasa saboda lokacin da aka lalata, musamman samfurin da ke jin tsoron kayan aikin semicondantor waɗanda suke jin tsoron sodium. Wannan nau'in bitar kada ta wuce 25 ℃.
Yawan zafi yana haifar da ƙarin matsaloli. Lokacin da dangi zafi ya wuce 55%, condensation zai samar akan bangon bututun ruwan sanyi. Idan ya faru cikin na'urorin daidaito ko da'irori, zai iya haifar da haɗari da yawa. Lokacin da dangi zafi shine 50%, yana da sauki tsatsa. Bugu da kari, lokacin da zafi yayi yawa, ƙura ta wuce zuwa farfajiya na silicon wafer za ta zama sarkar a saman ta cikin ruwa, wanda yake da wuya a cire.
A mafi girma dangi zafi zafi, da wuya shi ne cire m. Koyaya, lokacin da dangi zafi ke ƙasa da 30%, ana kuma sauƙaƙe adsorbed a farfajiya saboda aikin na'urorin wutan lantarki, kuma adadi mai yawa na na'urorin semictioncoric. Yawan zazzabi mai kyau na silicon wafer samar ne shine 35-45%.
Matsin iskakula daA cikin dakin da yake tsabta
Ga mafi yawan sarari sarari, don hana gurbata na waje, ya zama dole don kula da matsin lamba na ciki (matsi mai ƙarfi) sama da matsin lamba na waje (matsa lamba. Kulawa da bambancin matsin lamba ya kamata ya cika wannan ƙa'idodi masu zuwa:
1. Matsin lamba a cikin sarari mai tsabta ya kamata ya fi wannan sarari marasa tsabta.
2. Matsin lamba a cikin sarari tare da matakan tsabta yakamata ya fi wannan a sarari masu kusa da ƙananan matakan.
3. Kofofin da ke tsakanin ɗakunan dakuna masu tsabta ya kamata a buɗe don ɗakuna tare da matakan tsabta.
Kulawar canji mai bambancin matsi ya dogara da adadin iska mai kyau, wanda ya kamata ya iya rama don lalacewa ta iska daga rata a ƙarƙashin wannan yanayin bambancin. Don haka ma'anar ta zahiri ta bambancin matsi shine juriya na leakage (ko indiltration) iska mai gudana ta hanyar tsokoki daban-daban.
Lokaci: Jul-21-2023